Authors » Abstract Categories

  1. Packaging & Solid-state Materials and Fabrication Processes
    Examples: New fabrication process flows and parameter studies for solid-state material integration, fabrication, packaging and encapsulation (liquid or vacuum); 3D MEMS integration; High aspect ratio vias (TSVs) for devices and packaging; wafer bonding; Modeling and characterization of materials and fabrication processes.

  2. Nanoscale Materials and Fabrication
    Examples: Materials with new intrinsic properties for transducers, 1D and 2D materials; Device concepts enabled by nanoscale phenomena; Fabrication process flows, characterization, and integration of nanostructured materials; Modeling and characterization of nanoscale materials and fabrication processes.

  3. Composite Materials, Polymers, and Fabrication Processes
    Examples: Materials with new intrinsic properties, soft, elastic, stretchable or large area devices, such as devices in or on polymers, paper or fabrics, respective devices and fabrication process flows; Functional polymers, nanoparticle filled polymers. Modeling and characterization of composite and polymer materials including drift, reliability and aging.

  4. Microfluidics Platform Technologies
    Examples: Technologies, devices, and systems for manipulation of fluids, particles, and droplets; acousto-fluidics, opto-fluidics. Modeling and characterization of microfluidics platform technologies.

  5. Chemical Sensors and Microsystems
    Examples: Liquid and gas phase sensing, air quality, pollution sensor, particle and pollen sensors, water quality, safety sensors, and micro-scale chemical analysis systems; sensor platforms for environmental sensing; Modeling and characterization of chemical sensors and microsystems.

  6. Bio-Sensors and Microsystems including in-vitro Medical Applications
    Examples: Devices and instruments for in vitro measurement and handling of biological samples and bio markers; Medical diagnostics; Tools for therapeutic and vaccine discovery, development, and optimization; Modeling and characterization of bio-sensors, medical instruments, and microsystems.

  7. Wearable and In-vivo Medical Devices and Microsystems
    Examples: Devices and instruments for in vivo measurements, such as implantable devices and transducers, drug delivery systems, micro device/system for clinical use; biodegradable in vivo transducers, transient smart implantable MEMS; Modeling and characterization of wearable and in-vivo medical devices and microsystems.

  8. Physical Sensors and Microsystems
    Examples: Pressure, inertial, force, thermal, magnetic, acoustic, seismic, particle detection; Imaging systems based on physical sensors; Physical sensors to enable internet-of-things; Wearable physical micro sensors and systems; Theory, design, and modeling advances in physical sensors and systems.

  9. Energy, Power and Thermal Management
    Examples: Microsystems and technologies for energy conversion, storage, and management; energy harvesting; micro/nano enhanced solar cells; thermal, mechanical, triboelectric conversion; Zero Power Sensors; Modeling and characterization of energy, power and thermal management systems.

  10. RF MEMS, Resonators and Oscillators
    Examples: RF resonators (SAW, BAW, etc.), oscillators, clocks, filters, switches, tunable power dividers, phase shifters, circulators, micro relays; Modeling and characterization of RF devices and microsystems.

  11. Optical and Atomic Transducers
    Examples: Micro spectrometers, SPR based sensors, silicon photonics, fiber- based systems, plasmonic devices, integrated optics, micromirrors and LiDAR systems, tunable soft lenses; metamaterial-based transducers; optical resonators and clocks; atomic sensors; high performance infrared, visible, X-ray and UV sensing; Modeling and characterization of optical devices.

  12. Actuators and Microsystems
    Examples: Probe devices (AFM); Ultrasound imaging devices and systems; Acoustic transducers (CMUT, PMUT); Micro-/ nano-actuators and robots; DC switches; Modeling and characterization of actuators.